Sifat Optik dan Energi Gap Film Ferroelektrik LiTaSiO5 di Atas Substrat Silikon

ABSTRAK

Film tipis litium tantalat silikat (LiTaSiO5 ) berhasil dibuat pada substrat Si (100) tipe-p dan Si (111) tipe-n dengan metode chemical solution deposition (CSD) dengan variasi suhu annealing 600, 650, 700, 750, dan 800 C. Penentuan ketebalan lapisan tipis dengan metode volumetrik dan uji sifat optik dengan spektroskopi UV-Vis. Pengujian absorbansi menghasilkan panjang gelombang serapan maksimum film pada kedua substrat, yaitu 420 dan 980 nm. Energi bandgap terbesar film pada Si (100) tipe-p, yaitu 2,94 eV pada suhu 650ºC dan Si (111) tipe-n, yaitu 3,06 eV pada suhu 800ºC.

Kata kunci: energi gap, film tipis litium tantalat silikat, sifat optik

ABSTRACT

Lithium tantalate silicate (LiTaSiO5) has successfully been made on Si (100) p-type and Si (111) n-type by chemical solution deposition (CSD) technique with temperatures variation of 600, 650, 700, 750, and 800ºC. Determined the film thickness as well as and test the optical properties with UV-Vis spectroscopy. The maximum absorbance of the substrates were 420 and 980 nm. The maximum band of films on Si (100) was 2.94 eV a temperature of 650º C and Si (111) was 3.06 eV a temperature of 800º C.

Keywords: bandgap energy, lithium tantalate silicate thin film, optical properties

Download : PDF

Share...Share on FacebookTweet about this on TwitterShare on Google+Email this to someone

Close